| C06 (GF-6060) Main Collocation | |||
| Cov ntawv | Specification | Hom | |
| Linear Tsav | ULMAC3, ULMCC2 | XL | |
| Grating tus kav nyeem lub taub hau | Kev daws teeb meem 0.5μm / 1μm (xaiv) | Spain | |
| Tus tsav tsheb | SCFD-4D52AEB2, SCFD-0062AEB2 | Dynahead | |
| Z axis ntsia hlau liab module | XL-80h-s100 | XL | |
| Txiav taub hau | SIB 230 | Raytools | |
| Precision linear phau ntawv qhia | - | Hiwin | |
| Marble | 1800 * 1350 * 200 hli | Shangdong | |
| Plua plav npog | Txuj | Raytools | |
| Main tsis | |||
| Chaw ua haujlwm | 600mm * 600 hli | ||
| Qhov siab tshaj plaws acceleration | 2-5 G | ||
| X-axis nrawm nrawm nrawm | 60m / min | ||
| X-axis zoo stroke | 600 hli | ||
| X-axis positioning raug | ± 0.01 hli | ||
| X rov raug | ± 0.004 hli | ||
| Y-axis ceev txav ceev | 60m / min | ||
| Y-axis zoo stroke | 600 hli | ||
| Y-axis positioning raug | ± 0.01 hli | ||
| Y rov raug | ± 0.004 hli | ||
| Z axis taug kev | 100 hli | ||
| Ua haujlwm ambiance | |||
| Ua haujlwm kub | -10 ℃ 45 ℃ | ||
| txheeb ze humidity | <90% Tsis muaj condensation | ||
| Ib puag ncig | Qhov cua, tsis muaj kev vibration loj | ||
| Qhov hluav taws xob | 3 x 380V ± 10% 220V ± 10% | ||
| Lub zog zaus | 50 HZ | ||




